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Welcome to the Turner Research Group site. Our group investigates surface and interface mechanics problems in semiconductor manufacturing processes, microelectronics and micro-electromechanical systems (MEMS). We focus on understanding the underlying mechanics and materials science issues in small-scale systems and exploit this understanding to improve performance and develop novel solutions. Ongoing projects include processes for semiconductor materials integration and bonding, wear of atomic force microscope probes, soft materials adhesion, and microscale devices for probing biological cell adhesion.

Please browse the website for additional information on the group. If you have any questions or would like further information, please contact:

Prof. Kevin T. Turner

Department of Mechanical Engineering
and Applied Mechanics

245 Towne
220 S. 33rd St.
Philadelphia, PA 19104-6315

215.573.7485
kturner at seas.upenn.edu

 

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